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AXCELIS TECHNOLOGIES INC (ACLS)
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Filings
Date Filed
Type
Description
03/31/2023
DEF 14A
Form DEF 14A - Other definitive proxy statements:
03/30/2022
DEF 14A
Form DEF 14A - Other definitive proxy statements:
03/25/2021
DEF 14A
Form DEF 14A - Other definitive proxy statements:
03/30/2020
DEF 14A
Form DEF 14A - Other definitive proxy statements:
03/27/2019
DEF 14A
Form DEF 14A - Other definitive proxy statements:
03/27/2018
DEF 14A
Form DEF 14A - Other definitive proxy statements:
03/29/2017
DEF 14A
Form DEF 14A - Other definitive proxy statements:
04/11/2016
DEFA14A
Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material
04/11/2016
DEFA14A
Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material
04/04/2016
DEFA14A
Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material
03/14/2016
DEF 14A
Form DEF 14A - Other definitive proxy statements
03/25/2015
DEF 14A
Form DEF 14A - Other definitive proxy statements
03/06/2015
DEFA14A
Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material
02/13/2015
DEFA14A
Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material
03/25/2014
DEF 14A
Form DEF 14A - Other definitive proxy statements
05/06/2013
DEFA14A
Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material
03/26/2013
DEF 14A
Form DEF 14A - Other definitive proxy statements
04/17/2012
DEFA14A
Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material
03/23/2012
DEF 14A
Form DEF 14A - Other definitive proxy statements
03/24/2011
DEF 14A
Form DEF 14A - Other definitive proxy statements
03/23/2010
DEF 14A
Form DEF 14A - Other definitive proxy statements
04/02/2009
DEF 14A
Form DEF 14A - Other definitive proxy statements
04/14/2008
DEFA14A
Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material
04/14/2008
DEFA14A
Form DEFA14A - Additional definitive proxy soliciting materials and Rule 14(a)(12) material
03/27/2008
DEF 14A
Form DEF 14A - Other definitive proxy statements
03/30/2007
DEF 14A
Form DEF 14A - Other definitive proxy statements
03/31/2006
DEF 14A
Form DEF 14A - Other definitive proxy statements
04/01/2005
DEF 14A
Form DEF 14A - Other definitive proxy statements
03/18/2004
DEF 14A
Form DEF 14A - Other definitive proxy statements
04/30/2003
DEF 14A
Form DEF 14A - Other definitive proxy statements
03/20/2002
DEF 14A
Form DEF 14A - Other definitive proxy statements
04/30/2001
DEF 14A
Form DEF 14A - Other definitive proxy statements
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