Type	Name	Date
Merger agreement	Agreement and Plan of Merger, by and among Entegris, CMC and Merger Sub†	12/16/2021
Merger agreement	Agreement and Plan of Merger, by and among Versum Materials, Inc. and Entegris, Inc.†	01/29/2019
Merger agreement	Agreement and Plan of Merger, among Entegris, Inc., Atomic Merger Corporation and ATMI, Inc.	02/04/2014